Effect of seed layers on the performance of planar spiral microinductors

R. Walker, E. Sirotkin, J. G. Terry, S. Smith, M. P Y Desmulliez, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise the stress levels and structural properties of Ni80Fe20 films electro-deposited on both copper and nickel seed layers. In addition, planar spiral micro-inductors, with patterned magnetic cores, have been fabricated in order to confirm the improvement in the electrical performance from magnetic seed layers, as a result of enhanced magnetic and resistive contribution.

Original languageEnglish
Title of host publicationIEEE International Conference on Microelectronic Test Structures
PublisherIEEE
Pages135-140
Number of pages6
ISBN (Print)9781479921928
DOIs
Publication statusPublished - 1 Jan 2014
Event27th International Conference on Microelectronic Test Structures - Udine, United Kingdom
Duration: 24 Mar 201427 Mar 2014

Conference

Conference27th International Conference on Microelectronic Test Structures
Abbreviated titleICMTS 2014
CountryUnited Kingdom
CityUdine
Period24/03/1427/03/14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Walker, R., Sirotkin, E., Terry, J. G., Smith, S., Desmulliez, M. P. Y., & Walton, A. J. (2014). Effect of seed layers on the performance of planar spiral microinductors. In IEEE International Conference on Microelectronic Test Structures (pp. 135-140). [6841481] IEEE. https://doi.org/10.1109/ICMTS.2014.6841481