Effect of seed layers on the performance of planar spiral microinductors

R. Walker; E. Sirotkin; J. G. Terry; S. Smith; M. P Y Desmulliez; A. J. Walton

doi:10.1109/ICMTS.2014.6841481

Effect of seed layers on the performance of planar spiral microinductors

R. Walker, E. Sirotkin, J. G. Terry, S. Smith, M. P Y Desmulliez, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise the stress levels and structural properties of Ni80Fe20 films electro-deposited on both copper and nickel seed layers. In addition, planar spiral micro-inductors, with patterned magnetic cores, have been fabricated in order to confirm the improvement in the electrical performance from magnetic seed layers, as a result of enhanced magnetic and resistive contribution.

Original language	English
Title of host publication	IEEE International Conference on Microelectronic Test Structures
Publisher	IEEE
Pages	135-140
Number of pages	6
ISBN (Print)	9781479921928
DOIs	https://doi.org/10.1109/ICMTS.2014.6841481
Publication status	Published - 1 Jan 2014
Event	27th International Conference on Microelectronic Test Structures - Udine, United Kingdom Duration: 24 Mar 2014 → 27 Mar 2014

Conference

Conference	27th International Conference on Microelectronic Test Structures
Abbreviated title	ICMTS 2014
Country/Territory	United Kingdom
City	Udine
Period	24/03/14 → 27/03/14

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/ICMTS.2014.6841481

Cite this

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title = "Effect of seed layers on the performance of planar spiral microinductors",

abstract = "This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise the stress levels and structural properties of Ni80Fe20 films electro-deposited on both copper and nickel seed layers. In addition, planar spiral micro-inductors, with patterned magnetic cores, have been fabricated in order to confirm the improvement in the electrical performance from magnetic seed layers, as a result of enhanced magnetic and resistive contribution.",

author = "R. Walker and E. Sirotkin and Terry, {J. G.} and S. Smith and Desmulliez, {M. P Y} and Walton, {A. J.}",

year = "2014",

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doi = "10.1109/ICMTS.2014.6841481",

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booktitle = "IEEE International Conference on Microelectronic Test Structures",

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note = "27th International Conference on Microelectronic Test Structures, ICMTS 2014 ; Conference date: 24-03-2014 Through 27-03-2014",

}

Walker, R, Sirotkin, E, Terry, JG, Smith, S, Desmulliez, MPY & Walton, AJ 2014, Effect of seed layers on the performance of planar spiral microinductors. in IEEE International Conference on Microelectronic Test Structures., 6841481, IEEE, pp. 135-140, 27th International Conference on Microelectronic Test Structures, Udine, United Kingdom, 24/03/14. https://doi.org/10.1109/ICMTS.2014.6841481

TY - GEN

T1 - Effect of seed layers on the performance of planar spiral microinductors

AU - Walker, R.

AU - Sirotkin, E.

AU - Terry, J. G.

AU - Smith, S.

AU - Desmulliez, M. P Y

AU - Walton, A. J.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise the stress levels and structural properties of Ni80Fe20 films electro-deposited on both copper and nickel seed layers. In addition, planar spiral micro-inductors, with patterned magnetic cores, have been fabricated in order to confirm the improvement in the electrical performance from magnetic seed layers, as a result of enhanced magnetic and resistive contribution.

AB - This paper reports on the effect of the electrical performance related to magnetic seed layers used within planar power microinductors. These studies involve structural and magnetic characterisation of Ni80Fe20 films electro-deposited on non-magnetic and magnetic seed layers (i.e. copper and nickel respectively). Microelectronic mechanical test structures and xray analysis have been used to characterise the stress levels and structural properties of Ni80Fe20 films electro-deposited on both copper and nickel seed layers. In addition, planar spiral micro-inductors, with patterned magnetic cores, have been fabricated in order to confirm the improvement in the electrical performance from magnetic seed layers, as a result of enhanced magnetic and resistive contribution.

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M3 - Conference contribution

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SN - 9781479921928

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EP - 140

BT - IEEE International Conference on Microelectronic Test Structures

PB - IEEE

T2 - 27th International Conference on Microelectronic Test Structures

Y2 - 24 March 2014 through 27 March 2014

ER -

Effect of seed layers on the performance of planar spiral microinductors

Abstract

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