@inproceedings{2454ec330064425d90d73a550e2e30ea,
title = "Doping of sub-50nm SOI layers",
abstract = "Doping of thin body Si becomes very essential topic due to increasing interest of forming source/drain regions in fully depleted planar silicon-on-isolator (SOI) devices or vertical Fin field-effect-transistors (FinFETs). To diminish the role of the short-channel-effect (SCE) control, the Si layers thicknesses target the 10 nm range. In this paper many aspects of thin Si body doping are discussed: dopant retention, implantation-related amorphization, thin body recrystallization, sheet resistance (Rs) and carrier mobility in crystalline or amorphized material, impact of the annealing ambient on Rs for various SOI thicknesses. The complexity of 3D geometry for vertical Fin and the vicinity of the extended surface have an impact on doping strategies that are significantly different than for planar bulk devices.",
author = "Pawlak, {B. J.} and R. Duffy and {van Dal}, M. and F. Voogt and R. Weemaes and F. Roozeboom and P. Zalm and Nick Bennett and Cowern, {Nick E. B.}",
year = "2008",
doi = "10.1557/PROC-1070-E04-06",
language = "English",
isbn = "9781605110400",
series = "MRS Proceedings",
publisher = "Materials Research Society",
pages = "169--175",
booktitle = "Doping Engineering for Front-End Processing",
address = "United States",
note = "2008 MRS Spring Meeting ; Conference date: 25-03-2008 Through 27-03-2008",
}