Discharge uniformity control in kilowatt class, rf excited, large area electrode CO2 lasers

A. D. Colley; P. P. Vitruk; L. A. Doyle; H. J. Baker; D. R. Hall

Discharge uniformity control in kilowatt class, rf excited, large area electrode CO₂ lasers

A. D. Colley, P. P. Vitruk, L. A. Doyle, H. J. Baker, D. R. Hall

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper develops a computer model of very large area RF discharges that use nonuniform transmission line theory, combined with empirically determined data on the power density-dependent plasma impedance. The modeling results are related to the behavior of experimental CO₂ lasers with electrode lengths up to 800 mm, and widths of 100 mm, producing 1 kW output. Experimentally, it is found that kilowatt class lasers require additional power distribution networks to achieve uniform discharges. The options for power distribution techniques are presented, and the characteristics of the 1 kW laser that uses a two-stage network is discussed in relation to the modeling results.

Original language	English
Title of host publication	Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe
Pages	39
Publication status	Published - 1994
Event	1994 Conference on Lasers and Electro-Optics Europe - Amsterdam, Netherlands Duration: 28 Aug 1994 → 2 Sept 1994

Conference

Conference	1994 Conference on Lasers and Electro-Optics Europe
Country/Territory	Netherlands
City	Amsterdam
Period	28/08/94 → 2/09/94

Cite this

@inproceedings{4de78558ab044b55a0ced7e65b44540d,

title = "Discharge uniformity control in kilowatt class, rf excited, large area electrode CO2 lasers",

abstract = "This paper develops a computer model of very large area RF discharges that use nonuniform transmission line theory, combined with empirically determined data on the power density-dependent plasma impedance. The modeling results are related to the behavior of experimental CO2 lasers with electrode lengths up to 800 mm, and widths of 100 mm, producing 1 kW output. Experimentally, it is found that kilowatt class lasers require additional power distribution networks to achieve uniform discharges. The options for power distribution techniques are presented, and the characteristics of the 1 kW laser that uses a two-stage network is discussed in relation to the modeling results.",

author = "Colley, \{A. D.\} and Vitruk, \{P. P.\} and Doyle, \{L. A.\} and Baker, \{H. J.\} and Hall, \{D. R.\}",

year = "1994",

language = "English",

pages = "39",

booktitle = "Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe",

note = "1994 Conference on Lasers and Electro-Optics Europe ; Conference date: 28-08-1994 Through 02-09-1994",

}

TY - GEN

T1 - Discharge uniformity control in kilowatt class, rf excited, large area electrode CO2 lasers

AU - Colley, A. D.

AU - Vitruk, P. P.

AU - Doyle, L. A.

AU - Baker, H. J.

AU - Hall, D. R.

PY - 1994

Y1 - 1994

N2 - This paper develops a computer model of very large area RF discharges that use nonuniform transmission line theory, combined with empirically determined data on the power density-dependent plasma impedance. The modeling results are related to the behavior of experimental CO2 lasers with electrode lengths up to 800 mm, and widths of 100 mm, producing 1 kW output. Experimentally, it is found that kilowatt class lasers require additional power distribution networks to achieve uniform discharges. The options for power distribution techniques are presented, and the characteristics of the 1 kW laser that uses a two-stage network is discussed in relation to the modeling results.

AB - This paper develops a computer model of very large area RF discharges that use nonuniform transmission line theory, combined with empirically determined data on the power density-dependent plasma impedance. The modeling results are related to the behavior of experimental CO2 lasers with electrode lengths up to 800 mm, and widths of 100 mm, producing 1 kW output. Experimentally, it is found that kilowatt class lasers require additional power distribution networks to achieve uniform discharges. The options for power distribution techniques are presented, and the characteristics of the 1 kW laser that uses a two-stage network is discussed in relation to the modeling results.

UR - https://www.scopus.com/pages/publications/18344399052

M3 - Conference contribution

SP - 39

BT - Proceedings of the 1994 Conference on Lasers and Electro-Optics Europe

T2 - 1994 Conference on Lasers and Electro-Optics Europe

Y2 - 28 August 1994 through 2 September 1994

ER -

Discharge uniformity control in kilowatt class, rf excited, large area electrode CO₂ lasers

Abstract

Conference

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