Direct-write printing of an RF-MEMS Cantilever

A. Md Numan-Al-Mobin, R. Shankar, W. M. Cross, J. Kellar, K. W. Whites, D. E. Anagnostou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.

Original languageEnglish
Title of host publication2014 IEEE Antennas and Propagation Society International Symposium (APSURSI)
PublisherIEEE
Pages15-16
Number of pages2
ISBN (Electronic)9781479935406
ISBN (Print)9781479935383
DOIs
Publication statusPublished - 22 Sep 2014
Event2014 IEEE Antennas and Propagation Society International Symposium - Tenesse, Memphis, United States
Duration: 6 Jul 201411 Jul 2014

Conference

Conference2014 IEEE Antennas and Propagation Society International Symposium
Abbreviated titleAPSURSI
CountryUnited States
CityMemphis
Period6/07/1411/07/14

Keywords

  • Direct-Write
  • Flexible Electronics
  • RF MEMS

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Numan-Al-Mobin, A. M., Shankar, R., Cross, W. M., Kellar, J., Whites, K. W., & Anagnostou, D. E. (2014). Direct-write printing of an RF-MEMS Cantilever. In 2014 IEEE Antennas and Propagation Society International Symposium (APSURSI) (pp. 15-16). IEEE. https://doi.org/10.1109/APS.2014.6904339