Direct-write printing of an RF-MEMS Cantilever

A. Md Numan-Al-Mobin; R. Shankar; W. M. Cross; J. Kellar; K. W. Whites; D. E. Anagnostou

doi:10.1109/APS.2014.6904339

Direct-write printing of an RF-MEMS Cantilever

A. Md Numan-Al-Mobin^*, R. Shankar, W. M. Cross, J. Kellar, K. W. Whites, D. E. Anagnostou

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.

Original language	English
Title of host publication	2014 IEEE Antennas and Propagation Society International Symposium (APSURSI)
Publisher	IEEE
Pages	15-16
Number of pages	2
ISBN (Electronic)	9781479935406
ISBN (Print)	9781479935383
DOIs	https://doi.org/10.1109/APS.2014.6904339
Publication status	Published - 22 Sept 2014
Event	2014 IEEE Antennas and Propagation Society International Symposium - Tenesse, Memphis, United States Duration: 6 Jul 2014 → 11 Jul 2014

Conference

Conference	2014 IEEE Antennas and Propagation Society International Symposium
Abbreviated title	APSURSI
Country/Territory	United States
City	Memphis
Period	6/07/14 → 11/07/14

Keywords

Direct-Write
Flexible Electronics
RF MEMS

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/APS.2014.6904339

Cite this

@inproceedings{21b18e5dbfbb4a8b8336ad1d85fbf08f,

title = "Direct-write printing of an RF-MEMS Cantilever",

abstract = "This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.",

keywords = "Direct-Write, Flexible Electronics, RF MEMS",

author = "Numan-Al-Mobin, {A. Md} and R. Shankar and Cross, {W. M.} and J. Kellar and Whites, {K. W.} and Anagnostou, {D. E.}",

year = "2014",

month = sep,

day = "22",

doi = "10.1109/APS.2014.6904339",

language = "English",

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pages = "15--16",

booktitle = "2014 IEEE Antennas and Propagation Society International Symposium (APSURSI)",

publisher = "IEEE",

address = "United States",

note = "2014 IEEE Antennas and Propagation Society International Symposium, APSURSI ; Conference date: 06-07-2014 Through 11-07-2014",

}

Numan-Al-Mobin, AM, Shankar, R, Cross, WM, Kellar, J, Whites, KW & Anagnostou, DE 2014, Direct-write printing of an RF-MEMS Cantilever. in 2014 IEEE Antennas and Propagation Society International Symposium (APSURSI). IEEE, pp. 15-16, 2014 IEEE Antennas and Propagation Society International Symposium, Memphis, United States, 6/07/14. https://doi.org/10.1109/APS.2014.6904339

TY - GEN

T1 - Direct-write printing of an RF-MEMS Cantilever

AU - Numan-Al-Mobin, A. Md

AU - Shankar, R.

AU - Cross, W. M.

AU - Kellar, J.

AU - Whites, K. W.

AU - Anagnostou, D. E.

PY - 2014/9/22

Y1 - 2014/9/22

N2 - This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.

AB - This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.

KW - Direct-Write

KW - Flexible Electronics

KW - RF MEMS

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U2 - 10.1109/APS.2014.6904339

DO - 10.1109/APS.2014.6904339

M3 - Conference contribution

AN - SCOPUS:84907863190

SN - 9781479935383

SP - 15

EP - 16

BT - 2014 IEEE Antennas and Propagation Society International Symposium (APSURSI)

PB - IEEE

T2 - 2014 IEEE Antennas and Propagation Society International Symposium

Y2 - 6 July 2014 through 11 July 2014

ER -

Direct-write printing of an RF-MEMS Cantilever

Abstract

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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