Nanoscale light-emitting diodes (nanoLEDs) and arrays of nanoLEDs produced by laser controlled diffusion of interstitial manganese (Mni) donor ions out of the ferromagnetic semiconductor (GaMn)As towards the underlying layers of a quantum well heterostructure. The approach represents an alternative to deep etching for the creation of nanoscale current channels and nanoLEDs.
Makarovsky, O., Kumar, S., Rastelli, A., Patane, A., Eaves, L., Balanov, A. G., Schmidt, O. G., Campion, R., & Foxon, C. T. (2010). Direct Laser Writing of Nanoscale Light-Emitting Diodes. Advanced Materials, 22(29), 3176-3180. https://doi.org/10.1002/adma.200904409