Abstract
This paper reports on recent developments of high power RF MEMS switch. An approach using a matrix of switching elements for the development is introduced. The design and modelling of a 2 × 2 RF MEMS switch matrix of this type is described. The fabrication processes are presented. © 2004 IEEE.
Original language | English |
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Title of host publication | 2004 4th International Conference on Microwave and Millimeter Wave Technology, Proceedings, ICMMT 2004 |
Editors | Z Feng, W Chen |
Pages | P-7-P-10 |
Publication status | Published - 2004 |
Event | 2004 4th International Conference on Microwave and Millimeter Wave Technology - Beijing, China Duration: 18 Aug 2004 → 21 Aug 2004 |
Conference
Conference | 2004 4th International Conference on Microwave and Millimeter Wave Technology |
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Abbreviated title | ICMMT 2004 |
Country/Territory | China |
City | Beijing |
Period | 18/08/04 → 21/08/04 |