Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

P. John, Ibrahim M Odeh, M. J K Thomas, Michael J Tricker, J. I B Wilson, J. B A England, D. Newton

Research output: Contribution to journalArticle

Abstract

The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.

Original languageEnglish
Article number014
Pages (from-to)309-318
Number of pages10
JournalJournal of Physics C: Solid State Physics
Volume14
Issue number3
DOIs
Publication statusPublished - 1981

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