Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

P. John; Ibrahim M Odeh; M. J K Thomas; Michael J Tricker; J. I B Wilson; J. B A England; D. Newton

doi:10.1088/0022-3719/14/3/014

Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

P. John, Ibrahim M Odeh, M. J K Thomas, Michael J Tricker, J. I B Wilson, J. B A England, D. Newton

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega ₁^s and omega ₂^s, in the region 1800 to 2200 cm^-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm^-1. Effective oscillator strengths for the omega ₁^s and omega ₂^s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.

Original language	English
Article number	014
Pages (from-to)	309-318
Number of pages	10
Journal	Journal of Physics C: Solid State Physics
Volume	14
Issue number	3
DOIs	https://doi.org/10.1088/0022-3719/14/3/014
Publication status	Published - 1981

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abstract = "The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.",

author = "P. John and Odeh, {Ibrahim M} and Thomas, {M. J K} and Tricker, {Michael J} and Wilson, {J. I B} and England, {J. B A} and D. Newton",

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doi = "10.1088/0022-3719/14/3/014",

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T1 - Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

AU - John, P.

AU - Odeh, Ibrahim M

AU - Thomas, M. J K

AU - Tricker, Michael J

AU - Wilson, J. I B

AU - England, J. B A

AU - Newton, D.

PY - 1981

Y1 - 1981

N2 - The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.

AB - The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.

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DO - 10.1088/0022-3719/14/3/014

M3 - Article

SN - 0022-3719

VL - 14

SP - 309

EP - 318

JO - Journal of Physics C: Solid State Physics

JF - Journal of Physics C: Solid State Physics

IS - 3

M1 - 014

ER -

Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

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