Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

P. John, Ibrahim M Odeh, M. J K Thomas, Michael J Tricker, J. I B Wilson, J. B A England, D. Newton

Research output: Contribution to journalArticle

Abstract

The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.

Original languageEnglish
Article number014
Pages (from-to)309-318
Number of pages10
JournalJournal of Physics C: Solid State Physics
Volume14
Issue number3
DOIs
Publication statusPublished - 1981

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elastic scattering
infrared spectroscopy
silicon
hydrogen
glow discharges
oscillator strengths
infrared absorption
amorphous silicon
alpha particles
hydrogen atoms
matrices
atoms

Cite this

John, P. ; Odeh, Ibrahim M ; Thomas, M. J K ; Tricker, Michael J ; Wilson, J. I B ; England, J. B A ; Newton, D. / Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering. In: Journal of Physics C: Solid State Physics. 1981 ; Vol. 14, No. 3. pp. 309-318.
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Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering. / John, P.; Odeh, Ibrahim M; Thomas, M. J K; Tricker, Michael J; Wilson, J. I B; England, J. B A; Newton, D.

In: Journal of Physics C: Solid State Physics, Vol. 14, No. 3, 014, 1981, p. 309-318.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering

AU - John, P.

AU - Odeh, Ibrahim M

AU - Thomas, M. J K

AU - Tricker, Michael J

AU - Wilson, J. I B

AU - England, J. B A

AU - Newton, D.

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