| Original language | English |
|---|---|
| Publication status | Published - 2008 |
| Event | DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Nice, France Duration: 9 Apr 2008 → 11 Apr 2008 |
Conference
| Conference | DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS |
|---|---|
| Country/Territory | France |
| City | Nice |
| Period | 9/04/08 → 11/04/08 |