Design for reliability (DfR) in MEMS using worst-case methods

Shyam Praveen Vudathu; Srikanth Lavu; Rainer Laur

doi:10.1109/IPFA.2007.4378098

Design for reliability (DfR) in MEMS using worst-case methods

Shyam Praveen Vudathu, Srikanth Lavu, Rainer Laur

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods. © 2007 IEEE.

Original language	English
Title of host publication	Proceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007
Pages	267-272
Number of pages	6
DOIs	https://doi.org/10.1109/IPFA.2007.4378098
Publication status	Published - 2007
Event	2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Bangalore, India Duration: 11 Jul 2007 → 13 Jul 2007

Conference

Conference	2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits
Country/Territory	India
City	Bangalore
Period	11/07/07 → 13/07/07

Keywords

Critical operational parameters
MEMS in extreme environments
Operational parameters
Reliability analysis
Worst-Case Reliability Coefficient (WCRC)

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10.1109/IPFA.2007.4378098

Cite this

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title = "Design for reliability (DfR) in MEMS using worst-case methods",

abstract = "The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods. {\textcopyright} 2007 IEEE.",

keywords = "Critical operational parameters, MEMS in extreme environments, Operational parameters, Reliability analysis, Worst-Case Reliability Coefficient (WCRC)",

author = "Vudathu, {Shyam Praveen} and Srikanth Lavu and Rainer Laur",

year = "2007",

doi = "10.1109/IPFA.2007.4378098",

language = "English",

isbn = "1424410142",

pages = "267--272",

booktitle = "Proceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007",

note = "2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits ; Conference date: 11-07-2007 Through 13-07-2007",

}

Vudathu, SP, Lavu, S & Laur, R 2007, Design for reliability (DfR) in MEMS using worst-case methods. in Proceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007. pp. 267-272, 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, Bangalore, India, 11/07/07. https://doi.org/10.1109/IPFA.2007.4378098

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AU - Vudathu, Shyam Praveen

AU - Lavu, Srikanth

AU - Laur, Rainer

PY - 2007

Y1 - 2007

N2 - The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods. © 2007 IEEE.

AB - The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods. © 2007 IEEE.

KW - Critical operational parameters

KW - MEMS in extreme environments

KW - Operational parameters

KW - Reliability analysis

KW - Worst-Case Reliability Coefficient (WCRC)

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EP - 272

BT - Proceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007

T2 - 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Y2 - 11 July 2007 through 13 July 2007

ER -

Design for reliability (DfR) in MEMS using worst-case methods

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