Design for reliability (DfR) in MEMS using worst-case methods

Shyam Praveen Vudathu, Srikanth Lavu, Rainer Laur

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods. © 2007 IEEE.

Original languageEnglish
Title of host publicationProceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007
Pages267-272
Number of pages6
DOIs
Publication statusPublished - 2007
Event2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Bangalore, India
Duration: 11 Jul 200713 Jul 2007

Conference

Conference2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits
CountryIndia
CityBangalore
Period11/07/0713/07/07

Keywords

  • Critical operational parameters
  • MEMS in extreme environments
  • Operational parameters
  • Reliability analysis
  • Worst-Case Reliability Coefficient (WCRC)

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    Vudathu, S. P., Lavu, S., & Laur, R. (2007). Design for reliability (DfR) in MEMS using worst-case methods. In Proceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007 (pp. 267-272) https://doi.org/10.1109/IPFA.2007.4378098