Design, fabrication and testing of a hybrid micro-motion XY stage driven by voice coil actuators

Xavier Herpe, Ross Walker, Matthew Dunnigan, Xianwen Kong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Compliant micro-positioning stages offer high precision and repeatability. However, high accuracy typically involves a trade-off with workspace area and cost. This paper presents a compliant XY micro-motion stage, where hybrid manipulation has been implemented in an effort to maintain the workspace area and increase the positioning accuracy. The method presented in this work employs the use of a large range/low resolution linear encoders to measure the position of the stage (coarse positioning), before using short range/high resolution capacitive sensors to correct the positioning error (fine positioning). This solution achieves a positioning accuracy of greater than 3.28μm within a 6×6mm workspace. The compliant stage has been abrasive jet machined from Nylon-66 as its reduced Young's modulus is known to improve workspace area over conventional aluminium stages currently reported in literature.

Original languageEnglish
Title of host publication2016 International Conference for Students on Applied Engineering (ICSAE)
PublisherIEEE
Pages153-158
Number of pages6
ISBN (Electronic)9781467390538
DOIs
Publication statusPublished - 9 Jan 2017
Event1st International Conference for Students on Applied Engineering 2016 - Great North Museum, Newcastle-Upon-Tyne, United Kingdom
Duration: 20 Oct 201621 Oct 2016
http://www.icsae.co.uk/ (ICSAE website)

Conference

Conference1st International Conference for Students on Applied Engineering 2016
Abbreviated titleICSAE 2016
CountryUnited Kingdom
CityNewcastle-Upon-Tyne
Period20/10/1621/10/16
OtherThe ICSAE 2016 in Newcastle is an international event organized by motivated students who have passion towards Applied Engineering and dedicated to research students enthusiastic about the field. The event provides a platform for research students to present their work and exchange views with like-minded students from all around the world. It is an opportunity to develop skills and have some fun too!
Talks, sessions, and workshops are all geared up towards helping students to establish a post for themselves in Applied Engineering field and think about career paths after graduation. The event is an ideal environment for research students to test their presentation abilities, practice their poster designing skills, and most important is to learn how to communicate their ideas.
Internet address

Keywords

  • Compliant mechanism
  • Hybrid manipulation
  • Nonlinear model
  • XY stage

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Automotive Engineering
  • Electrical and Electronic Engineering
  • Fluid Flow and Transfer Processes
  • Computer Networks and Communications
  • Mechanical Engineering

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