Design, fabrication, and characterization of flip-chip bonded microinductors

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9 Citations (Scopus)


Magnetic core materials of higher performance than ferrite materials in the 0.5-10 MHz frequency range are investigated. The performance characteristics of electrodeposited nickel-iron, cobalt-iron-copper alloys, and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom made solenoid microinductor. Inductance values ranging from 0.3 to 120 µH with component power efficiency above 90% have been measured. Two highly laminated prototypes consisting of 70 and 105 laminates of 5 µm thick nickel-iron have achieved a power output efficiency of 92% at 0.5 MHz with power densities of 33 and 49 W/cm3, respectively. A design methodology based on material properties and device specifications is proposed for the manufacture of performant microinductors. Issues surrounding microinductor design and performance are discussed. © 2009 IEEE.

Original languageEnglish
Article number5170214
Pages (from-to)3055-3063
Number of pages9
JournalIEEE Transactions on Magnetics
Issue number8
Publication statusPublished - Aug 2009


  • DC-DC power conversion
  • Electrodeposition
  • Magnetic films
  • Microinductor


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