The design and fabrication of mininiaturized three-axis accelerometers to be used in the measurement of heart wall motion are presented in this paper. Results from animal studies carried out by the group have already demonstrated the usefulness of large commercial accelerometers for this medical application. The advanced sensors proposed here consist of full wafer thickness masses supported by thin cantilever beams. Piezoresistors, which are implanted into the surface of the thin beams, are used to measure any acceleration that the masses undergo. ©2008 IEEE.
|Title of host publication||Proceedings - 2008 2nd Electronics Systemintegration Technology Conference, ESTC|
|Number of pages||6|
|Publication status||Published - 2008|
|Event||2008 2nd Electronics Systemintegration Technology Conference - Greenwich, United Kingdom|
Duration: 1 Sep 2008 → 4 Sep 2008
|Conference||2008 2nd Electronics Systemintegration Technology Conference|
|Period||1/09/08 → 4/09/08|