The design of an optically and electrically pumped blue II-VI microcavity in the form of vertical cavity surface emitting laser (VSCEL) is discussed. The required growth tolerances of the active layer and cavity are achieved by optimization of MBE growth procedures, and dielectric mirror stacks with the required high reflectivity in the blue are grown by thermal deposition. The fabrication steps involved in the realization of devices include chemical wet etching used for selective substrate removal with good controllability and reproducibility.
|Journal||IEE Colloquium (Digest)|
|Publication status||Published - 1 Jan 1996|
|Event||Proceedings of the 1997 IEE Colloquium on Wide Bandgap Semiconductor Light Emitters - London, UK|
Duration: 16 Oct 1997 → 16 Oct 1997