Deflection Analysis of Modified blade of Turbomolecuar Pump under Dynamic Loading Conditions

Abdul Wasy Zia, Atta Ur Rehman Shah, Jung Il Song

Research output: Contribution to journalConference articlepeer-review


Turbo Molecular Pump (TMP) is widely being used in the Film deposition industry to produce high vacuum. The pump efficiency depends on motor frequency, impeller speed, and molecular weight of gas to be egested. Depending on the higher molecular weight and speed, deflection started to took place. If this deflection increases from safe limit at higher speeds, it may clash with the stator blade. This work is a continuity of [1], where results of optimized material properties and blade design was suggested. In this research, the authors were concerned with finding the maximum overall deflection and the maximum deflection taking place taking place along the radial and axial axis using numerical simulation.
Original languageEnglish
Pages (from-to)54-54
Number of pages1
JournalJournal of the Korean Society of Mechanical Engineers
Publication statusPublished - May 2013
EventKorean Society of Manufacturing Process Engineers, Annual Spring Conference 2013 - , Korea, Republic of
Duration: 1 May 20131 May 2013


  • Turbo pump
  • TMP
  • Blade design
  • deflection
  • Vacuum


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