Abstract
Turbo Molecular Pump (TMP) is widely being used in the Film deposition industry to produce high vacuum. The pump efficiency depends on motor frequency, impeller speed, and molecular weight of gas to be egested. Depending on the higher molecular weight and speed, deflection started to took place. If this deflection increases from safe limit at higher speeds, it may clash with the stator blade. This work is a continuity of [1], where results of optimized material properties and blade design was suggested. In this research, the authors were concerned with finding the maximum overall deflection and the maximum deflection taking place taking place along the radial and axial axis using numerical simulation.
| Original language | English |
|---|---|
| Pages (from-to) | 54-54 |
| Number of pages | 1 |
| Journal | Journal of the Korean Society of Mechanical Engineers |
| Volume | 2013 |
| Publication status | Published - May 2013 |
| Event | Korean Society of Manufacturing Process Engineers, Annual Spring Conference 2013 - , Korea, Republic of Duration: 1 May 2013 → 1 May 2013 https://www.dbpia.co.kr/journal/voisDetail?voisId=VOIS00108283 https://www.dbpia.co.kr/journal/voisDetail?voisId=VOIS00110033 |
Keywords
- Turbo pump
- TMP
- Blade design
- deflection
- Vacuum