CVD Reactors and Delivery Systems Technology

Research output: Chapter in Book/Report/Conference proceedingChapter


From the engineering perspective, the CVD system is essentially a “molecular scale” manufacturing facility. Just like any factory, the production rate is determined by the slowest step in the manufacturing process. The product quality, production economy and efficiency are assured by initial process...
Original languageEnglish
Title of host publicationChemical Vapour Deposition
Subtitle of host publicationPrecursors, Processes and Applications
EditorsA. C. Jones, M. L. Hitchman
Place of PublicationCambridge, UK
PublisherRoyal Society of Chemistry
Number of pages56
ISBN (Electronic)9781847558794
ISBN (Print)9780854044658
Publication statusPublished - 2009


  • Chemical vapor deposition
  • Thin Film materials


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