Coupled mechanical and electrostatic microactuator analysis

V. D. Samper, A. J. Sangster

Research output: Contribution to journalArticle

Abstract

A finite element analysis (FEA) software package is used to derive two- and three-dimensional models of electromechanical actuators. From the models, solutions to potentially complex coupled mechanical and electromagnetic problems are derived using batch programs. Results indicate that the overall dynamic performance of the actuators is strongly dependent on the friction models and less dependent on the error introduced by the variation of electrostatic forces between simple and complex electrical equations.

Original languageEnglish
JournalIEE Colloquium (Digest)
Issue number77
Publication statusPublished - 7 May 1997
EventProceedings of the 1997 IEE Colloquium on Computer Modelling Techniques for Microstructures - London, UK
Duration: 7 May 19977 May 1997

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