Conversion Efficiency of Alkoxide Precursor to Oxide Films Grown by an Ultrasonic‐Assisted, Pulsed Liquid Injection, Metalorganic Chemical Vapor Deposition (Pulsed‐CVD) Process

INIS

• liquids 100%
• efficiency 100%
• injection 100%
• conversion 100%
• coatings 100%
• films 100%
• oxides 100%
• precursor 100%
• chemical vapor deposition 100%
• alkoxides 100%
• growth 66%
• nickel 66%
• titanium oxides 33%
• applications 33%
• substrates 33%
• deposition 33%
• titanium 33%
• organometallic compounds 33%
• metals 33%
• polycrystals 33%
• morphology 33%
• zirconium oxides 33%
• surface area 33%
• thermal decomposition 33%
• turbine blades 33%
• rutile 33%
• thermal barriers 33%
• superalloys 33%

Material Science

• Vapor Phase Deposition 100%
• Film 100%
• Chemical Vapor Deposition 100%
• Oxide Compound 100%
• Oxide Film 100%
• Zirconia 50%
• Nickel-Based Superalloys 50%
• Titanium Dioxide 50%
• Titanium 50%
• Thermal Barrier Coatings 50%

Engineering

• Conversion Efficiency 100%
• Oxide Film 100%
• Chemical Vapor Deposition 100%
• Vapor Deposition 100%
• Deposition Process 100%
• Blade Turbine 33%
• Rutile Phase 33%
• High Growth Rate 33%
• Barrier Coating 33%
• Thermal Barrier 33%
• Columnar Grain 33%
• Polycrystalline 33%