Conversion Efficiency of Alkoxide Precursor to Oxide Films Grown by an Ultrasonic‐Assisted, Pulsed Liquid Injection, Metalorganic Chemical Vapor Deposition (Pulsed‐CVD) Process

Susan Krumdieck, Rishi Raj

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Polycrystalline coatings of an oxide, with a columnar grain morphology, were grown on metal substrates from metal-organic precursors using the pulsed-CVD process. In a model study, films of the rutile phase of titanium dioxide were grown on nickel by thermal decomposition of titanium isopropoxide. Growth rates of up to 0.3 μm/min were obtained with conversion efficiencies (mole oxide per mole precursor) approaching 100%. The high growth rates and conversion efficiencies portend the application of this method for the manufacture of films and coatings on large surface areas, as, for example, required in the deposition of zirconium dioxide on nickel-based superalloys to serve as thermal barrier coatings on turbine blades.

Original languageEnglish
Pages (from-to)1605-1607
Number of pages3
JournalJournal of the American Ceramic Society
Volume82
Issue number6
DOIs
Publication statusPublished - Jun 1999

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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