Control of stress in multilayered MEMS devices

Zheng Cui, Ling Wang, Aizi Jin, Jia Sheng Hong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Stress issue in multilayered thin film structures has been investigated in the example of RF MEMS switches. Although a sandwiched thin film structure in theory can offset the stress-induced bending of a cantilever beam, it rarely possible to realize such offset because of the complexity in thin film deposition processes. Computer modeling and experiments have been conducted to reduce the unbalance of stress in a sandwiched thin film structure. It has demonstrated that a balance of stress and bending can be achieved by fine adjustment of the thickness of top layer of thin film. ©2006 IEEE.

Original languageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages1224-1227
Number of pages4
DOIs
Publication statusPublished - 2006
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems
Abbreviated title1st IEEE-NEMS
CountryChina
CityZhuhai
Period18/01/0621/01/06

Keywords

  • RF MEMS
  • Stress induced bending
  • Thin film stress

Fingerprint Dive into the research topics of 'Control of stress in multilayered MEMS devices'. Together they form a unique fingerprint.

  • Cite this

    Cui, Z., Wang, L., Jin, A., & Hong, J. S. (2006). Control of stress in multilayered MEMS devices. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 1224-1227) https://doi.org/10.1109/NEMS.2006.334703