Conformality investigation of titanium dioxide thin films on 3-D micrometer- and nanometer-scale features by pulsed-pressure metal-organic CVD

Vilailuck Siriwongrungson*, Susan P. Krumdieck, Maan M. Alkaisi

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

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Material Science