Conformality investigation of titanium dioxide thin films on 3-D micrometer- and nanometer-scale features by pulsed-pressure metal-organic CVD
Vilailuck Siriwongrungson*, Susan P. Krumdieck, Maan M. Alkaisi
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
12
Link opens in a new tab
Citations
(Scopus)