Comparative study of glass and plastic refractive microlenses and their fabrication techniques

H. Ottevaere; R. Cox; H. P. Herzig; T. Miyashita; K. Naessens; M. Taghizadeh; R. Völkel; H. J. Woo; H. Thienpont

doi:10.1117/12.546709

Comparative study of glass and plastic refractive microlenses and their fabrication techniques

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, H. Thienpont

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.

Original language	English
Article number	03
Pages (from-to)	27-39
Number of pages	13
Journal	Proceedings of SPIE
Volume	5453
DOIs	https://doi.org/10.1117/12.546709
Publication status	Published - 2004
Event	Micro-Optics, VCSELs, and Photonic Interconnects - Strasbourg, France Duration: 27 Apr 2004 → 29 Apr 2004

Keywords

Glass and plastic microlenses
Microlens survey
Optical characterization
Refractive optics

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10.1117/12.546709

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title = "Comparative study of glass and plastic refractive microlenses and their fabrication techniques",

abstract = "In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.",

keywords = "Glass and plastic microlenses, Microlens survey, Optical characterization, Refractive optics",

author = "H. Ottevaere and R. Cox and Herzig, \{H. P.\} and T. Miyashita and K. Naessens and M. Taghizadeh and R. V{\"o}lkel and Woo, \{H. J.\} and H. Thienpont",

year = "2004",

doi = "10.1117/12.546709",

language = "English",

volume = "5453",

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journal = "Proceedings of SPIE",

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TY - JOUR

T1 - Comparative study of glass and plastic refractive microlenses and their fabrication techniques

AU - Ottevaere, H.

AU - Cox, R.

AU - Herzig, H. P.

AU - Miyashita, T.

AU - Naessens, K.

AU - Taghizadeh, M.

AU - Völkel, R.

AU - Woo, H. J.

AU - Thienpont, H.

PY - 2004

Y1 - 2004

N2 - In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.

AB - In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.

KW - Glass and plastic microlenses

KW - Microlens survey

KW - Optical characterization

KW - Refractive optics

UR - https://www.scopus.com/pages/publications/12344265910

U2 - 10.1117/12.546709

DO - 10.1117/12.546709

M3 - Article

SN - 1996-756X

VL - 5453

SP - 27

EP - 39

JO - Proceedings of SPIE

JF - Proceedings of SPIE

M1 - 03

T2 - Micro-Optics, VCSELs, and Photonic Interconnects

Y2 - 27 April 2004 through 29 April 2004

ER -

Comparative study of glass and plastic refractive microlenses and their fabrication techniques

Abstract

Keywords

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