Comparative study of glass and plastic refractive microlenses and their fabrication techniques

H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, H. Thienpont

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Abstract

In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.

Original languageEnglish
Article number03
Pages (from-to)27-39
Number of pages13
JournalProceedings of SPIE - the International Society for Optical Engineering
Volume5453
DOIs
Publication statusPublished - 2004
EventMicro-Optics, VCSELs, and Photonic Interconnects - Strasbourg, France
Duration: 27 Apr 200429 Apr 2004

Keywords

  • Glass and plastic microlenses
  • Microlens survey
  • Optical characterization
  • Refractive optics

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    Ottevaere, H., Cox, R., Herzig, H. P., Miyashita, T., Naessens, K., Taghizadeh, M., Völkel, R., Woo, H. J., & Thienpont, H. (2004). Comparative study of glass and plastic refractive microlenses and their fabrication techniques. Proceedings of SPIE - the International Society for Optical Engineering, 5453, 27-39. [03]. https://doi.org/10.1117/12.546709