Cold processing of green state LTCC with a CO2 laser

K. M. Nowak; H. J. Baker; D. R. Hall

doi:10.1007/s00339-006-3612-2

Cold processing of green state LTCC with a CO₂ laser

K. M. Nowak, H. J. Baker, D. R. Hall

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

71 Citations (Scopus)

Abstract

We report a novel "cold" self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the "green" state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.

Original language	English
Pages (from-to)	267-270
Number of pages	4
Journal	Applied Physics A: Materials Science and Processing
Volume	84
Issue number	3
DOIs	https://doi.org/10.1007/s00339-006-3612-2
Publication status	Published - Aug 2006

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@article{963826ac5fca44c9bb92c3603864d997,

title = "Cold processing of green state LTCC with a CO2 laser",

abstract = "We report a novel {"}cold{"} self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the {"}green{"} state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.",

author = "Nowak, \{K. M.\} and Baker, \{H. J.\} and Hall, \{D. R.\}",

year = "2006",

month = aug,

doi = "10.1007/s00339-006-3612-2",

language = "English",

volume = "84",

pages = "267--270",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "3",

}

TY - JOUR

T1 - Cold processing of green state LTCC with a CO2 laser

AU - Nowak, K. M.

AU - Baker, H. J.

AU - Hall, D. R.

PY - 2006/8

Y1 - 2006/8

N2 - We report a novel "cold" self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the "green" state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.

AB - We report a novel "cold" self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the "green" state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.

UR - https://www.scopus.com/pages/publications/33745161433

U2 - 10.1007/s00339-006-3612-2

DO - 10.1007/s00339-006-3612-2

M3 - Article

SN - 0947-8396

VL - 84

SP - 267

EP - 270

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 3

ER -

Cold processing of green state LTCC with a CO₂ laser

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