Cold processing of green state LTCC with a CO2 laser

K. M. Nowak, H. J. Baker, D. R. Hall

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

We report a novel "cold" self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the "green" state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.

Original languageEnglish
Pages (from-to)267-270
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume84
Issue number3
DOIs
Publication statusPublished - Aug 2006

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