We report a novel "cold" self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the "green" state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.
|Number of pages
|Applied Physics A: Materials Science and Processing
|Published - Aug 2006