Cold processing of green state LTCC with a CO2 laser

K. M. Nowak; H. J. Baker; D. R. Hall

doi:10.1007/s00339-006-3612-2

Cold processing of green state LTCC with a CO₂ laser

K. M. Nowak, H. J. Baker, D. R. Hall

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

71 Citations (Scopus)

Abstract

We report a novel "cold" self-cleaning technique for processing low temperature co-fired ceramic (LTCC) in the "green" state at high resolution and high speed, using a low power carbon dioxide laser. A particle ejection process involving both the ceramic grains and the organic binder produces material removal rates of >100µm per pulse with lateral processing resolution of 50µm and depth resolution comparable to ceramic grain size with no heat-effected zone or other deleterious thermal effects. The process has been used to drill microvias and to machine arbitrary shapes with high resolution.

Original language	English
Pages (from-to)	267-270
Number of pages	4
Journal	Applied Physics A: Materials Science and Processing
Volume	84
Issue number	3
DOIs	https://doi.org/10.1007/s00339-006-3612-2
Publication status	Published - Aug 2006

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Cold processing of green state LTCC with a CO₂ laser

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