| Original language | English |
|---|---|
| Title of host publication | The Chemistry in the Semiconductor Industry |
| Publisher | Blackie |
| Chapter | 5 |
| ISBN (Print) | 0216920051, 0412013215 |
| Publication status | Published - 1987 |
Chemical Vapour Deposition
Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review