Abstract
The electrical features of a high power alpha-mode RF discharge at 125 MHz are investigated experimentally. An equivalent circuit description of the discharge is presented and a theoretical model proposed which accounts for the role of the near-electrode capacitive ion sheaths in stabilizing the discharge plasma region, and explains the increased overall discharge stability at high excitation frequencies.
| Original language | English |
|---|---|
| Pages (from-to) | 1767-1776 |
| Number of pages | 10 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 25 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 1992 |
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