Abstract
The electrical features of a high power alpha-mode RF discharge at 125 MHz are investigated experimentally. An equivalent circuit description of the discharge is presented and a theoretical model proposed which accounts for the role of the near-electrode capacitive ion sheaths in stabilizing the discharge plasma region, and explains the increased overall discharge stability at high excitation frequencies.
Original language | English |
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Pages (from-to) | 1767-1776 |
Number of pages | 10 |
Journal | Journal of Physics D: Applied Physics |
Volume | 25 |
Issue number | 12 |
DOIs | |
Publication status | Published - 1992 |