Characterisation of ion transportation during electroplating of high aspect ratio microvia using megasonic agitation

David Flynn

Research output: Contribution to conference › Paper

Original languageEnglish
Publication statusPublished - 2011
EventEuropean Microelectronics and Packaging Conference - Brighton, United Kingdom
Duration: 1 Sept 2011 → …

Conference

ConferenceEuropean Microelectronics and Packaging Conference
Country/TerritoryUnited Kingdom
CityBrighton
Period1/09/11 → …

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