Calibration of an optical fluorescence method for film thickness measurement

Anita C Jones, M. Millington, J. Muhl, J. M. De Freitas, James S Barton, G. Gregory

Research output: Contribution to journalArticle

Abstract

We describe the calibration of a technique allowing quantitative measurements of industrial coatings with thicknesses as small as 10-20 nm. Wax films doped with fluorescent rhodamine dye have been deposited by an electrospray method onto an optically flat surface of aluminium-coated glass. The films were of 220-450 nm peak thickness, which we measured with an optical profilometer using laser triangulation. Possession of a set of films allowing an absolute calibration of the fluorescence intensity versus thickness to be achieved for application in trials of the fluorescence method for measuring coating thicknesses of 10-20 nm under industrial process conditions.

Original languageEnglish
Pages (from-to)N23-N27
Number of pages5
JournalMeasurement Science and Technology
Volume12
Issue number5
DOIs
Publication statusPublished - May 2001

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film thickness
fluorescence
coatings
profilometers
waxes
triangulation
rhodamine
flat surfaces
dyes
aluminum
glass
lasers

Cite this

Jones, A. C., Millington, M., Muhl, J., De Freitas, J. M., Barton, J. S., & Gregory, G. (2001). Calibration of an optical fluorescence method for film thickness measurement. Measurement Science and Technology, 12(5), N23-N27. https://doi.org/10.1088/0957-0233/12/5/401
Jones, Anita C ; Millington, M. ; Muhl, J. ; De Freitas, J. M. ; Barton, James S ; Gregory, G. / Calibration of an optical fluorescence method for film thickness measurement. In: Measurement Science and Technology. 2001 ; Vol. 12, No. 5. pp. N23-N27.
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Jones, AC, Millington, M, Muhl, J, De Freitas, JM, Barton, JS & Gregory, G 2001, 'Calibration of an optical fluorescence method for film thickness measurement', Measurement Science and Technology, vol. 12, no. 5, pp. N23-N27. https://doi.org/10.1088/0957-0233/12/5/401

Calibration of an optical fluorescence method for film thickness measurement. / Jones, Anita C; Millington, M.; Muhl, J.; De Freitas, J. M.; Barton, James S; Gregory, G.

In: Measurement Science and Technology, Vol. 12, No. 5, 05.2001, p. N23-N27.

Research output: Contribution to journalArticle

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