Calibration of an optical fluorescence method for film thickness measurement

Anita C Jones, M. Millington, J. Muhl, J. M. De Freitas, James S Barton, G. Gregory

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

We describe the calibration of a technique allowing quantitative measurements of industrial coatings with thicknesses as small as 10-20 nm. Wax films doped with fluorescent rhodamine dye have been deposited by an electrospray method onto an optically flat surface of aluminium-coated glass. The films were of 220-450 nm peak thickness, which we measured with an optical profilometer using laser triangulation. Possession of a set of films allowing an absolute calibration of the fluorescence intensity versus thickness to be achieved for application in trials of the fluorescence method for measuring coating thicknesses of 10-20 nm under industrial process conditions.

Original languageEnglish
Pages (from-to)N23-N27
Number of pages5
JournalMeasurement Science and Technology
Volume12
Issue number5
DOIs
Publication statusPublished - May 2001

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