TY - JOUR
T1 - Built-In Self-Test (BIST) Methods for MEMS
T2 - A Review
AU - Hantos, Gergely
AU - Flynn, David
AU - Desmulliez, Marc P. Y.
N1 - Funding Information:
This research was funded in part by the Engineering and Physical Sciences Research Council under the Centre for Doctoral Training in Embedded intelligence (CDT-EI) under the grant number 1799140.
Publisher Copyright:
© 2020 by the authors. Licensee MDPI, Basel, Switzerland.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/1
Y1 - 2021/1
N2 - A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).
AB - A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).
KW - Built-in-self-test (BIST)
KW - Failure modes
KW - Micro-electro-mechanical systems (MEMS) test
KW - Multi-functional sensors
UR - http://www.scopus.com/inward/record.url?scp=85099523837&partnerID=8YFLogxK
U2 - 10.3390/mi12010040
DO - 10.3390/mi12010040
M3 - Review article
C2 - 33396351
SN - 2072-666X
VL - 12
JO - Micromachines
JF - Micromachines
IS - 1
M1 - 40
ER -