Built-In Self-Test (BIST) Methods for MEMS: A Review

Research output: Contribution to journalReview articlepeer-review

16 Citations (Scopus)
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A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).

Original languageEnglish
Article number40
Issue number1
Early online date31 Dec 2020
Publication statusPublished - Jan 2021


  • Built-in-self-test (BIST)
  • Failure modes
  • Micro-electro-mechanical systems (MEMS) test
  • Multi-functional sensors

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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