BCB film based SAW humidity sensor

Yufei Liu; Changhai Wang; Y  Li

doi:10.1049/el.2011.2078

BCB film based SAW humidity sensor

Yufei Liu
, Changhai Wang
, Y Li

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Novel benzocyclobutene (BCB) film based surface acoustic wave
(SAW) humidity sensors were successfully designed and fabricated.
A sensitivity of 0.26 dB/RH% was successfully demonstrated
between 8.6 and 90.6% relative humidity (RH), with a linear relationship
between RH level and resonance amplitude. The temperature
stability of resonance frequency and amplitude has also been studied.

Original language	English
Pages (from-to)	1012-1014
Number of pages	2
Journal	Electronics Letters
Volume	47
Issue number	18
DOIs	https://doi.org/10.1049/el.2011.2078
Publication status	Published - 1 Sept 2011

Keywords

BCB
SAW sensor

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10.1049/el.2011.2078

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@article{a776589f06024abca77723f821c0777e,

title = "BCB film based SAW humidity sensor",

abstract = "Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH\% was successfully demonstrated between 8.6 and 90.6\% relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.",

keywords = "BCB, SAW sensor",

author = "Yufei Liu and Changhai Wang and Y Li",

year = "2011",

month = sep,

day = "1",

doi = "10.1049/el.2011.2078",

language = "English",

volume = "47",

pages = "1012--1014",

journal = "Electronics Letters",

issn = "1350-911X",

publisher = "John Wiley \& Sons Inc.",

number = "18",

}

TY - JOUR

T1 - BCB film based SAW humidity sensor

AU - Liu, Yufei

AU - Wang, Changhai

AU - Li, Y

PY - 2011/9/1

Y1 - 2011/9/1

N2 - Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH% was successfully demonstrated between 8.6 and 90.6% relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.

AB - Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH% was successfully demonstrated between 8.6 and 90.6% relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.

KW - BCB

KW - SAW sensor

U2 - 10.1049/el.2011.2078

DO - 10.1049/el.2011.2078

M3 - Article

SN - 1350-911X

VL - 47

SP - 1012

EP - 1014

JO - Electronics Letters

JF - Electronics Letters

IS - 18

ER -

BCB film based SAW humidity sensor

Abstract

Keywords

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