Abstract
Novel benzocyclobutene (BCB) film based surface acoustic wave
(SAW) humidity sensors were successfully designed and fabricated.
A sensitivity of 0.26 dB/RH% was successfully demonstrated
between 8.6 and 90.6% relative humidity (RH), with a linear relationship
between RH level and resonance amplitude. The temperature
stability of resonance frequency and amplitude has also been studied.
(SAW) humidity sensors were successfully designed and fabricated.
A sensitivity of 0.26 dB/RH% was successfully demonstrated
between 8.6 and 90.6% relative humidity (RH), with a linear relationship
between RH level and resonance amplitude. The temperature
stability of resonance frequency and amplitude has also been studied.
| Original language | English |
|---|---|
| Pages (from-to) | 1012-1014 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 47 |
| Issue number | 18 |
| DOIs | |
| Publication status | Published - 1 Sept 2011 |
Keywords
- BCB
- SAW sensor