BCB film based SAW humidity sensor

Yufei Liu, Changhai Wang, Y Li

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Novel benzocyclobutene (BCB) film based surface acoustic wave
(SAW) humidity sensors were successfully designed and fabricated.
A sensitivity of 0.26 dB/RH% was successfully demonstrated
between 8.6 and 90.6% relative humidity (RH), with a linear relationship
between RH level and resonance amplitude. The temperature
stability of resonance frequency and amplitude has also been studied.
Original languageEnglish
Pages (from-to)1012-1014
Number of pages2
JournalElectronics Letters
Issue number18
Publication statusPublished - 1 Sept 2011


  • BCB
  • SAW sensor


Dive into the research topics of 'BCB film based SAW humidity sensor'. Together they form a unique fingerprint.

Cite this