BCB film based SAW humidity sensor

Yufei Liu, Changhai Wang, Y Li

Research output: Contribution to journalArticle

Abstract

Novel benzocyclobutene (BCB) film based surface acoustic wave
(SAW) humidity sensors were successfully designed and fabricated.
A sensitivity of 0.26 dB/RH% was successfully demonstrated
between 8.6 and 90.6% relative humidity (RH), with a linear relationship
between RH level and resonance amplitude. The temperature
stability of resonance frequency and amplitude has also been studied.
Original languageEnglish
Pages (from-to)1012-1014
Number of pages2
JournalElectronics Letters
Volume47
Issue number18
DOIs
Publication statusPublished - 1 Sep 2011

Fingerprint

humidity
acoustics
sensors
sensitivity

Keywords

  • BCB
  • SAW sensor

Cite this

Liu, Yufei ; Wang, Changhai ; Li, Y . / BCB film based SAW humidity sensor. In: Electronics Letters. 2011 ; Vol. 47, No. 18. pp. 1012-1014.
@article{a776589f06024abca77723f821c0777e,
title = "BCB film based SAW humidity sensor",
abstract = "Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH{\%} was successfully demonstrated between 8.6 and 90.6{\%} relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.",
keywords = "BCB, SAW sensor",
author = "Yufei Liu and Changhai Wang and Y Li",
year = "2011",
month = "9",
day = "1",
doi = "10.1049/el.2011.2078",
language = "English",
volume = "47",
pages = "1012--1014",
journal = "Electronics Letters",
issn = "0013-5194",
publisher = "Institution of Engineering and Technology",
number = "18",

}

BCB film based SAW humidity sensor. / Liu, Yufei; Wang, Changhai; Li, Y .

In: Electronics Letters, Vol. 47, No. 18, 01.09.2011, p. 1012-1014.

Research output: Contribution to journalArticle

TY - JOUR

T1 - BCB film based SAW humidity sensor

AU - Liu, Yufei

AU - Wang, Changhai

AU - Li, Y

PY - 2011/9/1

Y1 - 2011/9/1

N2 - Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH% was successfully demonstrated between 8.6 and 90.6% relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.

AB - Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH% was successfully demonstrated between 8.6 and 90.6% relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.

KW - BCB

KW - SAW sensor

U2 - 10.1049/el.2011.2078

DO - 10.1049/el.2011.2078

M3 - Article

VL - 47

SP - 1012

EP - 1014

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

IS - 18

ER -