BCB film based SAW humidity sensor

Yufei Liu, Changhai Wang, Y Li

Research output: Contribution to journalArticle

Abstract

Novel benzocyclobutene (BCB) film based surface acoustic wave
(SAW) humidity sensors were successfully designed and fabricated.
A sensitivity of 0.26 dB/RH% was successfully demonstrated
between 8.6 and 90.6% relative humidity (RH), with a linear relationship
between RH level and resonance amplitude. The temperature
stability of resonance frequency and amplitude has also been studied.
Original languageEnglish
Pages (from-to)1012-1014
Number of pages2
JournalElectronics Letters
Volume47
Issue number18
DOIs
Publication statusPublished - 1 Sep 2011

Keywords

  • BCB
  • SAW sensor

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