| Original language | English |
|---|---|
| Pages | 63 |
| Number of pages | 1 |
| Publication status | Published - 2003 |
| Event | Mat. Res. Soc. Symp. Proc. - Duration: 1 Jan 2003 → … |
Conference
| Conference | Mat. Res. Soc. Symp. Proc. |
|---|---|
| Period | 1/01/03 → … |
Application of a fib system to nanolithography
RM Langford, S O'Reilly, Iain James McEwen
Research output: Contribution to conference › Paper › peer-review