Application of a fib system to nanolithography

RM Langford, S O'Reilly, Iain James McEwen

Research output: Contribution to conferencePaper

Original languageEnglish
Pages63
Number of pages1
Publication statusPublished - 2003
EventMat. Res. Soc. Symp. Proc. -
Duration: 1 Jan 2003 → …

Conference

ConferenceMat. Res. Soc. Symp. Proc.
Period1/01/03 → …

Cite this

Langford, RM., O'Reilly, S., & McEwen, I. J. (2003). Application of a fib system to nanolithography. 63. Paper presented at Mat. Res. Soc. Symp. Proc., .