Application of a fib system to nanolithography

RM Langford, S O'Reilly, Iain James McEwen

Research output: Contribution to conferencePaper

Original languageEnglish
Pages63
Number of pages1
Publication statusPublished - 2003
EventMat. Res. Soc. Symp. Proc. -
Duration: 1 Jan 2003 → …

Conference

ConferenceMat. Res. Soc. Symp. Proc.
Period1/01/03 → …

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