Amorphous silicon nitride optical grating beam splitters

M. R. Taghizadeh; J. I B Wilson; J. Turunen; A. Vasara; J. Westerholm

Amorphous silicon nitride optical grating beam splitters

M. R. Taghizadeh, J. I B Wilson, J. Turunen, A. Vasara, J. Westerholm

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. © 1989.

Original language	English
Pages (from-to)	165-167
Number of pages	3
Journal	Journal of Non-Crystalline Solids
Volume	115
Issue number	1-3
Publication status	Published - 3 Dec 1989

Cite this

@article{c25480760c7345cc89a9e25963ba0655,

title = "Amorphous silicon nitride optical grating beam splitters",

abstract = "Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. {\textcopyright} 1989.",

author = "Taghizadeh, \{M. R.\} and Wilson, \{J. I B\} and J. Turunen and A. Vasara and J. Westerholm",

year = "1989",

month = dec,

day = "3",

language = "English",

volume = "115",

pages = "165--167",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

number = "1-3",

}

TY - JOUR

T1 - Amorphous silicon nitride optical grating beam splitters

AU - Taghizadeh, M. R.

AU - Wilson, J. I B

AU - Turunen, J.

AU - Vasara, A.

AU - Westerholm, J.

PY - 1989/12/3

Y1 - 1989/12/3

N2 - Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. © 1989.

AB - Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. © 1989.

UR - https://www.scopus.com/pages/publications/0024823802

M3 - Article

SN - 0022-3093

VL - 115

SP - 165

EP - 167

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 1-3

ER -

Amorphous silicon nitride optical grating beam splitters

Abstract

Other files and links

Fingerprint

Cite this