Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. © 1989.
|Number of pages||3|
|Journal||Journal of Non-Crystalline Solids|
|Publication status||Published - 3 Dec 1989|