Abstract
Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. © 1989.
| Original language | English |
|---|---|
| Pages (from-to) | 165-167 |
| Number of pages | 3 |
| Journal | Journal of Non-Crystalline Solids |
| Volume | 115 |
| Issue number | 1-3 |
| Publication status | Published - 3 Dec 1989 |