Amorphous silicon nitride optical grating beam splitters

M. R. Taghizadeh, J. I B Wilson, J. Turunen, A. Vasara, J. Westerholm

Research output: Contribution to journalArticlepeer-review

Abstract

Two-dimensional arrays of regularly spaced, equal intensity beams have been generated from a single laser beam by a Dammann grating fabricated from plasma deposited silicon nitride. The properties of this material which make it suitable for such application and the process of converting the thin-films into gratings is described, as well as the performance of the completed devices. © 1989.

Original languageEnglish
Pages (from-to)165-167
Number of pages3
JournalJournal of Non-Crystalline Solids
Volume115
Issue number1-3
Publication statusPublished - 3 Dec 1989

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