Al2O3 coatings on stainless steel using pulsed-pressure MOCVD

S. Krumdieck, S. Davies, C. M. Bishop, T. Kemmitt, J. V. Kennedy

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Alumina coatings were deposited by pulsed-pressure metalorganic chemical vapour deposition (PP-MOCVD). A single-source liquid aluminium isopropoxide (C9H21O3Al) precursor solution in toluene was used. As-machined type 304L stainless steel substrates were coated over a range of deposition temperatures from 450°C to 800°C. Coatings were characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), energy dispersive spectroscopy (EDS), x-ray diffraction (XRD) and Rutherford backscattering spectroscopy (RBS). The coatings conformally and uniformly coated the micro-rough steel surface with no evidence of cracking. All of the coatings were amorphous, and no carbon was detected in the films.

Original languageEnglish
Pages (from-to)208-212
Number of pages5
JournalSurface and Coatings Technology
Volume230
DOIs
Publication statusPublished - 15 Sep 2013

Keywords

  • Alumina coatings
  • Amorphous
  • Conformality
  • Pulsed-pressure MOCVD
  • Stoichiometric

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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