Abstract
We report an additive manufacturing process using in-house custom-made inks for the fabrication of ohmic contact RF MEMS switches. The fabrication involves multiple steps of additive printing using a conductive silver ink and a PMMA [poly(methyl methacrylate)] photoresistive polymer ink. The inks comply with the rheology requirements of the M3D material deposition system. Deposition is made at 40°C and feature sizes involve 10-20μm. The maximum temperature of the process depends on ink curing and was 250°C. A functional ohmic contact cantilever RF MEMS switch on flexible Kapton™ substrate was fabricated and tested successfully, and results are presented.
Original language | English |
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Title of host publication | 2014 IEEE MTT-S International Microwave Symposium (IMS2014) |
Publisher | IEEE |
ISBN (Print) | 9781479938698 |
DOIs | |
Publication status | Published - 10 Jul 2014 |
Event | 2014 IEEE MTT-S International Microwave Symposium - Tampa, FL, United States Duration: 1 Jun 2014 → 6 Jun 2014 |
Conference
Conference | 2014 IEEE MTT-S International Microwave Symposium |
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Abbreviated title | IMS 2014 |
Country/Territory | United States |
City | Tampa, FL |
Period | 1/06/14 → 6/06/14 |
Keywords
- Direct-Write
- Flexible Electronics
- RF MEMS
ASJC Scopus subject areas
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering