Advances in direct-write printing of RF-MEMS using M3D

Abu M. N. Al-Mobin, R. Shankar, W. Cross, J. Kellar, K. W. Whites, D. E. Anagnostou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

We report an additive manufacturing process using in-house custom-made inks for the fabrication of ohmic contact RF MEMS switches. The fabrication involves multiple steps of additive printing using a conductive silver ink and a PMMA [poly(methyl methacrylate)] photoresistive polymer ink. The inks comply with the rheology requirements of the M3D material deposition system. Deposition is made at 40°C and feature sizes involve 10-20μm. The maximum temperature of the process depends on ink curing and was 250°C. A functional ohmic contact cantilever RF MEMS switch on flexible Kapton™ substrate was fabricated and tested successfully, and results are presented.

Original languageEnglish
Title of host publication2014 IEEE MTT-S International Microwave Symposium (IMS2014)
PublisherIEEE
ISBN (Print)9781479938698
DOIs
Publication statusPublished - 10 Jul 2014
Event2014 IEEE MTT-S International Microwave Symposium - Tampa, FL, United States
Duration: 1 Jun 20146 Jun 2014

Conference

Conference2014 IEEE MTT-S International Microwave Symposium
Abbreviated titleIMS 2014
CountryUnited States
CityTampa, FL
Period1/06/146/06/14

Keywords

  • Direct-Write
  • Flexible Electronics
  • RF MEMS

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    N. Al-Mobin, A. M., Shankar, R., Cross, W., Kellar, J., Whites, K. W., & Anagnostou, D. E. (2014). Advances in direct-write printing of RF-MEMS using M3D. In 2014 IEEE MTT-S International Microwave Symposium (IMS2014) [6848652] IEEE. https://doi.org/10.1109/MWSYM.2014.6848652