Fingerprint Dive into the research topics of 'Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor
V. D. Samper, A. J. Sangster, U. Wallrabe, R. L. Reuben, J. K. Grund
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)