Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

V. D. Samper; A. J. Sangster; U. Wallrabe; R. L. Reuben; J. K. Grund

Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

V. D. Samper, A. J. Sangster, U. Wallrabe, R. L. Reuben, J. K. Grund

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

This work concerns the alleviation of friction in a novel design of multistator electrostatic wobble motor. The output torque and the kinematic accuracy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been developed using an advanced LIGA technique to integrate polymethylmethacrylate (PMMA) cylinders into nickel micro structures. A new version of the micromotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing stabilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes. [334].

Original language	English
Pages (from-to)	423-427
Number of pages	5
Journal	Journal of Microelectromechanical Systems
Volume	7
Issue number	4
Publication status	Published - Dec 1998

Keywords

Electrostatic bearing
Electrostatic motor
LIGA process
Micromotor
Wobble motor

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@article{ff0ff03103cd44e98641e3cd5eab0a5f,

title = "Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor",

abstract = "This work concerns the alleviation of friction in a novel design of multistator electrostatic wobble motor. The output torque and the kinematic accuracy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been developed using an advanced LIGA technique to integrate polymethylmethacrylate (PMMA) cylinders into nickel micro structures. A new version of the micromotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing stabilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes. [334].",

keywords = "Electrostatic bearing, Electrostatic motor, LIGA process, Micromotor, Wobble motor",

author = "Samper, {V. D.} and Sangster, {A. J.} and U. Wallrabe and Reuben, {R. L.} and Grund, {J. K.}",

year = "1998",

month = dec,

language = "English",

volume = "7",

pages = "423--427",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

number = "4",

}

TY - JOUR

T1 - Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor

AU - Samper, V. D.

AU - Sangster, A. J.

AU - Wallrabe, U.

AU - Reuben, R. L.

AU - Grund, J. K.

PY - 1998/12

Y1 - 1998/12

N2 - This work concerns the alleviation of friction in a novel design of multistator electrostatic wobble motor. The output torque and the kinematic accuracy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been developed using an advanced LIGA technique to integrate polymethylmethacrylate (PMMA) cylinders into nickel micro structures. A new version of the micromotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing stabilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes. [334].

AB - This work concerns the alleviation of friction in a novel design of multistator electrostatic wobble motor. The output torque and the kinematic accuracy of this device are limited by the sliding friction between the rotor and the top surface of the bearing. A solution for an axial bearing has been developed using an advanced LIGA technique to integrate polymethylmethacrylate (PMMA) cylinders into nickel micro structures. A new version of the micromotor has been fabricated, utilizing an axial electrostatic field to hold the rotor against an engineered sliding surface. The integrated bearing stabilizes the rotor and potentially permits operation in liquid environments by sealing the stator electrodes. [334].

KW - Electrostatic bearing

KW - Electrostatic motor

KW - LIGA process

KW - Micromotor

KW - Wobble motor

M3 - Article

VL - 7

SP - 423

EP - 427

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 4

ER -