Advanced LIGA technology for the integration of an electrostatic bearing in a wobble micromotor

V D Samper, U Wallrabe, Robert Lewis Reuben, A J Sangster, J K Grund

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	423-427
Number of pages	5
Journal	Journal of Microelectromechanical Systems
Volume	7
Publication status	Published - 1998

Cite this

@article{9ffe4e9244964019a8bee6dd74fee77f,

title = "Advanced LIGA technology for the integration of an electrostatic bearing in a wobble micromotor",

author = "Samper, \{V D\} and U Wallrabe and Reuben, \{Robert Lewis\} and Sangster, \{A J\} and Grund, \{J K\}",

year = "1998",

language = "English",

volume = "7",

pages = "423--427",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

}

TY - JOUR

T1 - Advanced LIGA technology for the integration of an electrostatic bearing in a wobble micromotor

AU - Samper, V D

AU - Wallrabe, U

AU - Reuben, Robert Lewis

AU - Sangster, A J

AU - Grund, J K

PY - 1998

Y1 - 1998

M3 - Article

SN - 1057-7157

VL - 7

SP - 423

EP - 427

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -