Acquisition and processing of scanning electron microscope images using a PC and a framestore

J. A. McClean, R. S. Dhariwal, N. G. Milne

Research output: Contribution to journalArticle

Abstract

A versatile, low-cost data acquisition and processing system for scanning electron microscope (SEM) images has been successfully developed and demonstrated. This is based on an Amstrad PC and a framestore interfaced to the SEM, and is an upgrade of an earlier BBC microbased system. In addition to supporting colour x-ray mapping, as reported previously, the PC-based unit incorporates new features which enhance the system's performance, flexibility, and overall user friendliness. An example of the system's capabilities in a very large-scale integrated circuit application is presented. This relates to the processing and analysis of a series of images taken on the surface of a Motorola MC 68000 microprocessor, with and without a voltage stimulus.

Original languageEnglish
Pages (from-to)174-182
Number of pages9
JournalScanning
Volume14
Issue number3
Publication statusPublished - 1992

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    McClean, J. A., Dhariwal, R. S., & Milne, N. G. (1992). Acquisition and processing of scanning electron microscope images using a PC and a framestore. Scanning, 14(3), 174-182.