A versatile, low-cost data acquisition and processing system for scanning electron microscope (SEM) images has been successfully developed and demonstrated. This is based on an Amstrad PC and a framestore interfaced to the SEM, and is an upgrade of an earlier BBC microbased system. In addition to supporting colour x-ray mapping, as reported previously, the PC-based unit incorporates new features which enhance the system's performance, flexibility, and overall user friendliness. An example of the system's capabilities in a very large-scale integrated circuit application is presented. This relates to the processing and analysis of a series of images taken on the surface of a Motorola MC 68000 microprocessor, with and without a voltage stimulus.
|Number of pages||9|
|Publication status||Published - 1992|