Acoustic methods for detection of specific failure modes in capacitive MEMS microphones

Gergely Hantos, Marc Desmulliez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Acoustic methods for detection of specific failure modes in capacitive MEMS microphones'. Together they form a unique fingerprint.

INIS

Engineering