Acoustic methods for detection of specific failure modes in capacitive MEMS microphones

Gergely Hantos, Marc Desmulliez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Capacitive MEMS microphones are found today in the majority of mobile phones. Methods to detect failures easily and non-invasively during the manufacturing or usage of microphones, and to maintain microphones performance have become of critical importance to microphones and mobile phones manufacturers. This article provides four new methods, based solely on acoustic measurements to measure pull-in voltage and snapback voltage ranges, and to identify the states of electrostatic capture for single membrane capacitive MEMS microphones. 100% success rate in detecting membrane capture events is demonstrated for this type of device.

Original languageEnglish
Title of host publication2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)
PublisherIEEE
ISBN (Electronic)9781728162935
DOIs
Publication statusPublished - 23 Oct 2020
Event8th IEEE Electronics System-Integration Technology Conference 2020 - Tonsberg, Vestfold, Norway
Duration: 15 Sep 202018 Sep 2020

Conference

Conference8th IEEE Electronics System-Integration Technology Conference 2020
Abbreviated titleESTC 2020
Country/TerritoryNorway
CityTonsberg, Vestfold
Period15/09/2018/09/20

Keywords

  • Acoustic MEMS
  • BISR
  • BIST
  • Built-in-self-repair
  • Built-in-self-test
  • Data science
  • Failure induction
  • Microphone

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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