Abstract
Capacitive MEMS microphones are found today in the majority of mobile phones. Methods to detect failures easily and non-invasively during the manufacturing or usage of microphones, and to maintain microphones performance have become of critical importance to microphones and mobile phones manufacturers. This article provides four new methods, based solely on acoustic measurements to measure pull-in voltage and snapback voltage ranges, and to identify the states of electrostatic capture for single membrane capacitive MEMS microphones. 100% success rate in detecting membrane capture events is demonstrated for this type of device.
Original language | English |
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Title of host publication | 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) |
Publisher | IEEE |
ISBN (Electronic) | 9781728162935 |
DOIs | |
Publication status | Published - 23 Oct 2020 |
Event | 8th IEEE Electronics System-Integration Technology Conference 2020 - Tonsberg, Vestfold, Norway Duration: 15 Sept 2020 → 18 Sept 2020 |
Conference
Conference | 8th IEEE Electronics System-Integration Technology Conference 2020 |
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Abbreviated title | ESTC 2020 |
Country/Territory | Norway |
City | Tonsberg, Vestfold |
Period | 15/09/20 → 18/09/20 |
Keywords
- Acoustic MEMS
- BISR
- BIST
- Built-in-self-repair
- Built-in-self-test
- Data science
- Failure induction
- Microphone
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation