Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor

A. J. Sangster, Victor D. Samper

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Dynamic simulation of milimeter-scale micromotors using finite-element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examines an analytic model, together with two-dimensional (2-D) and three-dimensional (3-D) finite-element electrostatic torque models, of a double-stator wobble motor, to assess the trade-off between accuracy and computational efficiency, with a view to incorporate the optimum model within a dynamic simulation of a motor of this type.

Original languageEnglish
Pages (from-to)142-150
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume6
Issue number2
Publication statusPublished - Jun 1997

Keywords

  • Electrostatic
  • Finite element
  • LIGA
  • Micromotor
  • Wobble motor

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