Dynamic simulation of milimeter-scale micromotors using finite-element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examines an analytic model, together with two-dimensional (2-D) and three-dimensional (3-D) finite-element electrostatic torque models, of a double-stator wobble motor, to assess the trade-off between accuracy and computational efficiency, with a view to incorporate the optimum model within a dynamic simulation of a motor of this type.
|Number of pages||9|
|Journal||Journal of Microelectromechanical Systems|
|Publication status||Published - Jun 1997|
- Finite element
- Wobble motor