A study of wear on MEMS contact morphologies

INIS

• wear 100%
• morphology 100%
• carbon 66%
• diamonds 66%
• silicon nitrides 66%
• range 50%
• silicon 50%
• doped materials 50%
• microstructure 33%
• single crystals 33%
• weight 16%
• surfaces 16%
• mechanical properties 16%
• performance 16%
• loading 16%
• fractures 16%
• deformation 16%
• increasing 16%
• fabrication 16%
• distance 16%
• silicon oxides 16%
• chemical properties 16%

Engineering

• Micro-Electro-Mechanical System 100%
• Diamond-Like Carbon 80%
• Polysilicon 60%
• Microstructure 40%
• Silicon Single Crystal 40%
• Test Specimen 20%
• Contact Force 20%
• Contact Pressure 20%
• Nitride 20%
• Pin-on-Disc 20%
• Sliding Distance 20%
• Deadweight 20%
• Contact Area 20%
• Silicon Dioxide (Sio2) 20%
• Micromotors 20%

Material Science

• Microelectromechanical System 100%
• Diamond-Like Carbon 80%
• Silicon Nitride 80%
• Silicon 60%
• Single Crystal 40%
• Microstructure 40%
• Contact Area 20%
• Chemical Property 20%
• Silicon Dioxide 20%