A Reconfigurable 3-D-Stacked SPAD Imager with In-Pixel Histogramming for Flash LIDAR or High-Speed Time-of-Flight Imaging

  • Sam W. Hutchings
  • , Nick Johnston
  • , Istvan Gyongy
  • , Tarek Al Abbas
  • , Neale A. W. Dutton
  • , Max Tyler
  • , Susan Chan
  • , Jonathan Leach
  • , Robert K. Henderson*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

190 Citations (Scopus)
1685 Downloads (Pure)

Abstract

A 256 × 256 single-photon avalanche diode (SPAD) sensor integrated into a 3-D-stacked 90-nm 1P4M/40-nm 1P8M process is reported for flash light detection and ranging (LIDAR) or high-speed direct time-of-flight (ToF) 3-D imaging. The sensor bottom tier is composed of a 64 × 64 matrix of 36.72 μm pitch modular photon processing units which operate from shared 4 × 4 SPADs at 9.18 μm pitch and 51% fill-factor. A 16 × 14 bit counter array integrates photon counts or events to compress data to 31.4 Mb/s at 30-frame/s readout over 8 I/O operating at 100 MHz. The pixel-parallel multi-event time-to-digital converter (TDC) approach employs a programmable internal or external clock for 0.56-560-ns time bin resolution. In conjunction with a per-pixel correlator, the power is reduced to less than 100 mW in practical daylight ranging scenarios. Examples of ranging and high-speed 3-D ToF applications are given.

Original languageEnglish
Pages (from-to)2947-2956
Number of pages10
JournalIEEE Journal of Solid-State Circuits
Volume54
Issue number11
Early online date25 Sept 2019
DOIs
Publication statusPublished - Nov 2019

Keywords

  • 3-D imaging
  • CMOS
  • direct time of flight (dToF)
  • histogramming
  • image sensor
  • light detection and ranging (LIDAR)
  • single-photon avalanche diodes (SPADs)
  • TDC sharing architecture
  • time of flight (ToF)
  • time-to-digital converter (TDC)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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