A real-time method for monitoring the three-dimensional extent of high power cw laser beams

I W Boyd

Research output: Contribution to journalArticlepeer-review

Abstract

A simple and very accurate method is presented that allows not only one section of a cw laser beam to be studied in real-time but the full three-dimensional extent of its mode profile. The use of a ball-bearing to controllably defocus extremely high beam power densities in two planes is a novel approach which has been successfully used for beam measurements applied to laser-induced oxidation, and laser annealing of silicon. Although specifically applied to the infra-red regime, this technique may be extended to the study of visible radiation by using the appropriate detectors. © 1983.

Original languageEnglish
Pages (from-to)150-152
Number of pages3
JournalOptics and Laser Technology
Volume15
Issue number3
Publication statusPublished - Jun 1983

Keywords

  • annealing
  • beam monitoring
  • lasers
  • silicon

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