Abstract
A simple and very accurate method is presented that allows not only one section of a cw laser beam to be studied in real-time but the full three-dimensional extent of its mode profile. The use of a ball-bearing to controllably defocus extremely high beam power densities in two planes is a novel approach which has been successfully used for beam measurements applied to laser-induced oxidation, and laser annealing of silicon. Although specifically applied to the infra-red regime, this technique may be extended to the study of visible radiation by using the appropriate detectors. © 1983.
Original language | English |
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Pages (from-to) | 150-152 |
Number of pages | 3 |
Journal | Optics and Laser Technology |
Volume | 15 |
Issue number | 3 |
Publication status | Published - Jun 1983 |
Keywords
- annealing
- beam monitoring
- lasers
- silicon