A rapid technique for the direct metallization of PDMS substrates for flexible and stretchable electronics applications

Assel Ryspayeva, Thomas D. A. Jones, Mohammadreza Nekouie Esfahani, Matthew P. Shuttleworth, Russell A. Harris, Robert W. Kay, Marc Phillipe Yves Desmulliez, Jose Marques-Hueso

Research output: Contribution to journalArticle

Abstract

Metallization of a polydimethylsiloxane (PDMS)-based substrate is a challenge due to the difficulties in forming crack-free polymer and metal features using standard deposition techniques. Frequently, additional adhesion layers, rigid substrates, multiple processing steps (lift-off and etching) and expensive metal sputtering techniques are required, to achieve such metal patterns. This work presents a novel and rapid technique for the direct metallization of PDMS substrates using photolithography and electroless copper plating. The method has the advantage of not requiring expensive vacuum processing or multiple metallization steps. Electroless copper layer is demonstrated to have a strong adhesion to PDMS substrate with a high conductivity of (3.6 ± 0.7) × 107 S/m, which is close to the bulk copper (5.9 × 107 S/m). The copper-plated PDMS substrate displays mechanical and electrical stability whilst undergoing stretching deformations up to 10% due to applied strain. A functional electronic circuit was fabricated as a demonstration of the mechanical integrity of the copper-plated PDMS after bending.
Original languageEnglish
Pages (from-to)35-40
Number of pages6
JournalMicroelectronic Engineering
Volume209
Early online date12 Mar 2019
DOIs
Publication statusPublished - 15 Mar 2019

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copper
electronics
adhesion
metals
photolithography
plating
integrity
cracks
sputtering
etching
conductivity
vacuum
polymers

Cite this

Ryspayeva, Assel ; Jones, Thomas D. A. ; Esfahani, Mohammadreza Nekouie ; Shuttleworth, Matthew P. ; Harris, Russell A. ; Kay, Robert W. ; Desmulliez, Marc Phillipe Yves ; Marques-Hueso, Jose. / A rapid technique for the direct metallization of PDMS substrates for flexible and stretchable electronics applications. In: Microelectronic Engineering. 2019 ; Vol. 209. pp. 35-40.
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A rapid technique for the direct metallization of PDMS substrates for flexible and stretchable electronics applications. / Ryspayeva, Assel; Jones, Thomas D. A.; Esfahani, Mohammadreza Nekouie; Shuttleworth, Matthew P.; Harris, Russell A.; Kay, Robert W.; Desmulliez, Marc Phillipe Yves; Marques-Hueso, Jose.

In: Microelectronic Engineering, Vol. 209, 15.03.2019, p. 35-40.

Research output: Contribution to journalArticle

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AU - Ryspayeva, Assel

AU - Jones, Thomas D. A.

AU - Esfahani, Mohammadreza Nekouie

AU - Shuttleworth, Matthew P.

AU - Harris, Russell A.

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AU - Desmulliez, Marc Phillipe Yves

AU - Marques-Hueso, Jose

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